Inventor
KRAUS DIETER
DE11 patents
⚠️ This page may combine multiple inventors who share the name “KRAUS DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS8382301B2Feb 26, 2013
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination
ZEISS CARL SMT GMBH18 citations91
US8585224B2Nov 19, 2013
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination
ZEISS CARL SMT GMBH11 citations82
US8054446B2Nov 8, 2011
EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface
ZEISS CARL SMT GMBH5 citations61