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Inventor
DO JAE-CHUL
KR
2 patents
Patents
2 patents
US8968514B2
Mar 3, 2015
Gas distributing device and substrate processing apparatus including the same
DO JAE-CHUL
2 citations
50
US9398732B2
Jul 19, 2016
Power supplying means having shielding means for feeding line and substrate processing apparatus including the same
DO JAE-CHUL
1 citations
40