Inventor

JEON BU-IL

KR5 patents

⚠️ This page may combine multiple inventors who share the name “JEON BU-IL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JUSUNG ENG CO LTD

2 patents

US7951261B2May 31, 2011

Plasma etching apparatus

JUSUNG ENG CO LTD11 citations79

US7879187B2Feb 1, 2011

Plasma etching apparatus

JUSUNG ENG CO LTD8 citations79

DO JAE-CHUL

2 patents

US8968514B2Mar 3, 2015

Gas distributing device and substrate processing apparatus including the same

DO JAE-CHUL2 citations50

US9398732B2Jul 19, 2016

Power supplying means having shielding means for feeding line and substrate processing apparatus including the same

DO JAE-CHUL1 citations40

JEON BU-IL

1 patent

US8177992B2May 15, 2012

Plasma etching apparatus

JEON BU-IL0 citations41