Inventor

SONG MYUNG-GON

KR3 patents

⚠️ This page may combine multiple inventors who share the name “SONG MYUNG-GON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DO JAE-CHUL

2 patents

US8968514B2Mar 3, 2015

Gas distributing device and substrate processing apparatus including the same

DO JAE-CHUL2 citations50

US9398732B2Jul 19, 2016

Power supplying means having shielding means for feeding line and substrate processing apparatus including the same

DO JAE-CHUL1 citations40

SAMSUNG ELECTRONICS CO LTD

1 patent

US7646003B2Jan 12, 2010

Focusing apparatus and lithography system using the same

SAMSUNG ELECTRONICS CO LTD0 citations50