Inventor
YOTSUMOTO TADASHI
BR7 patents
⚠️ This page may combine multiple inventors who share the name “YOTSUMOTO TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
5 patentsUS6123120ASep 26, 2000
Clean storage equipment for substrates and method of storing substrates
TOSHIBA KK99 citations96
US6267123B1Jul 31, 2001
Pod and method of cleaning it
TOSHIBA KK46 citations94
US7065725B2Jun 20, 2006
Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus
TOSHIBA KK14 citations82
US6422247B2Jul 23, 2002
Pod and method of cleaning it
TOSHIBA KK10 citations72
US7478347B2Jan 13, 2009
Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus
TOSHIBA KK3 citations61