Inventor
HAMADA KEISHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “HAMADA KEISHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patentsUS12244972B2Mar 4, 2025
Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium
TOKYO ELECTRON LTD0 citations55
US10248030B2Apr 2, 2019
Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus
TOKYO ELECTRON LTD0 citations38