Inventor
TORII KENGO
JP5 patents
Patents
5 patentsUS10256105B2Apr 9, 2019
Disc-shaped heater and heater-cooling-plate assembly
NGK INSULATORS LTD2 citations69
US11515180B2Nov 29, 2022
Wafer-heating device
NGK INSULATORS LTD0 citations59
US11437260B2Sep 6, 2022
Heater for semiconductor manufacturing apparatus
NGK INSULATORS LTD0 citations59
US10566228B2Feb 18, 2020
Heater for semiconductor manufacturing apparatus
NGK INSULATORS LTD1 citations59
US11476147B2Oct 18, 2022
Wafer holding table
NGK INSULATORS LTD0 citations40