Inventor
DE GROOT PETER
US69 patents
⚠️ This page may combine multiple inventors who share the name “DE GROOT PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
44 patentsUS6313918B1Nov 6, 2001
Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
ZYGO CORP130 citations99
US6249351B1Jun 19, 2001
Grazing incidence interferometer and method
ZYGO CORP150 citations99
US6195168B1Feb 27, 2001
Infrared scanning interferometry apparatus and method
ZYGO CORP180 citations99
US5398113AMar 14, 1995
Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms
ZYGO CORP321 citations99
US7428057B2Sep 23, 2008
Interferometer for determining characteristics of an object surface, including processing and calibration
ZYGO CORP75 citations98
US6252667B1Jun 26, 2001
Interferometer having a dynamic beam steering assembly
ZYGO CORP101 citations98
US6219144B1Apr 17, 2001
Apparatus and method for measuring the refractive index and optical path length effects of air using multiple-pass interferometry
ZYGO CORP86 citations98
US5671050ASep 23, 1997
Method and apparatus for profiling surfaces using diffracative optics
ZYGO CORP99 citations98
US5663793ASep 2, 1997
Homodyne interferometric receiver and calibration method having improved accuracy and functionality
ZYGO CORP113 citations98
US7616323B2Nov 10, 2009
Interferometer with multiple modes of operation for determining characteristics of an object surface
ZYGO CORP37 citations96
US7446882B2Nov 4, 2008
Interferometer for determining characteristics of an object surface
ZYGO CORP45 citations96
US7324214B2Jan 29, 2008
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP102 citations96
US6822745B2Nov 23, 2004
Optical systems for measuring form and geometric dimensions of precision engineered parts
ZYGO CORP97 citations96
US6529279B2Mar 4, 2003
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP43 citations96
US6525825B2Feb 25, 2003
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP47 citations96
US6327039B1Dec 4, 2001
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP73 citations96
US6236507B1May 22, 2001
Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components
ZYGO CORP80 citations96
US5838485ANov 17, 1998
Superheterodyne interferometer and method for compensating the refractive index of air using electronic frequency multiplication
ZYGO CORP74 citations96
US5644562AJul 1, 1997
Method and apparatus for measuring and compensating birefringence in rotating disks
ZYGO CORP76 citations96
US5488477AJan 30, 1996
Methods and apparatus for profiling surfaces of transparent objects
ZYGO CORP81 citations96
US5473434ADec 5, 1995
Phase shifting interferometer and method for surface topography measurement
ZYGO CORP80 citations96
US7948637B2May 24, 2011
Error compensation in phase shifting interferometry
ZYGO CORP22 citations93
US7884947B2Feb 8, 2011
Interferometry for determining characteristics of an object surface, with spatially coherent illumination
ZYGO CORP26 citations93
US7869057B2Jan 11, 2011
Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis
ZYGO CORP36 citations93
US7636168B2Dec 22, 2009
Interferometry method and system including spectral decomposition
ZYGO CORP20 citations93
US7321431B2Jan 22, 2008
Method and system for analyzing low-coherence interferometry signals for information about thin film structures
ZYGO CORP28 citations93
US6631004B1Oct 7, 2003
Single-pass and multi-pass interferometry systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
ZYGO CORP31 citations93
US6011624AJan 4, 2000
Geometrically-Desensitized interferometer with adjustable range of measurement depths
ZYGO CORP45 citations93
US5999263ADec 7, 1999
Method and apparatus for performing interferometric measurements with reduced sensitivity to vibration
ZYGO CORP30 citations93
US5995224ANov 30, 1999
Full-field geometrically-desensitized interferometer employing diffractive and conventional optics
ZYGO CORP35 citations93
US5953125ASep 14, 1999
Optical gap measuring apparatus and method
ZYGO CORP49 citations93
US5751427AMay 12, 1998
Optical gap measuring apparatus and method
ZYGO CORP45 citations93
US5600441AFeb 4, 1997
Interferometer and method for measuring the distance of an object surface with respect to the surface of a rotating disk
ZYGO CORP28 citations93
US5598265AJan 28, 1997
Method for profiling an object surface using a large equivalent wavelength and system therefor
ZYGO CORP48 citations93
US5557399ASep 17, 1996
Optical gap measuring apparatus and method
ZYGO CORP34 citations93
US8379218B2Feb 19, 2013
Fiber-based interferometer system for monitoring an imaging interferometer
ZYGO CORP20 citations92
US7978338B2Jul 12, 2011
Compound reference interferometer
ZYGO CORP14 citations92
US7948636B2May 24, 2011
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP17 citations92
US7924435B2Apr 12, 2011
Apparatus and method for measuring characteristics of surface features
ZYGO CORP28 citations92
US7684049B2Mar 23, 2010
Interferometer and method for measuring characteristics of optically unresolved surface features
ZYGO CORP18 citations92
US6525826B2Feb 25, 2003
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP22 citations92
US6407816B1Jun 18, 2002
Interferometer and method for measuring the refractive index and optical path length effects of air
ZYGO CORP32 citations92
US7636166B2Dec 22, 2009
Interferometer system for monitoring an object
ZYGO CORP14 citations90
US8004688B2Aug 23, 2011
Scan error correction in low coherence scanning interferometry
ZYGO CORP9 citations84
DE GROOT PETER
3 patentsUS8126677B2Feb 28, 2012
Analyzing surface structure using scanning interferometry
DE GROOT PETER22 citations92
US8780334B1Jul 15, 2014
Topographical profiling with coherence scanning interferometry
DE GROOT PETER12 citations84
US8072611B2Dec 6, 2011
Interferometric analysis of under-resolved features
DE GROOT PETER10 citations84
HUGHES DANBURY OPTICAL SYST
1 patentPERKIN ELMER CORP
1 patentSECO PACKING
1 patentShowing the top 50 of 69 patents by PatentIndex Score.