Inventor
HIGASHI HIROYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HIGASHI HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10685858B2Jun 16, 2020
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US9865483B2Jan 9, 2018
Substrate liquid processing method, substrate liquid processing apparatus, and recording medium
TOKYO ELECTRON LTD1 citations50
US10937669B2Mar 2, 2021
Substrate solution-treatment apparatus, treatment solution supplying method and storage medium
TOKYO ELECTRON LTD0 citations47
US12424459B2Sep 23, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations45