Inventor
SUN JENNIFER
US15 patents
⚠️ This page may combine multiple inventors who share the name “SUN JENNIFER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6949203B2Sep 27, 2005
System level in-situ integrated dielectric etch process particularly useful for copper dual damascene
APPLIED MATERIALS INC69 citations97
US10818481B2Oct 27, 2020
Smart device fabrication via precision patterning
APPLIED MATERIALS INC2 citations71
US11540432B2Dec 27, 2022
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC1 citations70
US10734202B2Aug 4, 2020
Rare-earth oxide based erosion resistant coatings for semiconductor application
APPLIED MATERIALS INC1 citations62
US7919722B2Apr 5, 2011
Method for fabricating plasma reactor parts
APPLIED MATERIALS INC5 citations62
US9420639B2Aug 16, 2016
Smart device fabrication via precision patterning
APPLIED MATERIALS INC2 citations60
US12564012B2Feb 24, 2026
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US12004337B2Jun 4, 2024
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11547030B2Jan 3, 2023
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US9597734B2Mar 21, 2017
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
APPLIED MATERIALS INC0 citations51
US7942965B2May 17, 2011
Method of fabricating plasma reactor parts
APPLIED MATERIALS INC0 citations51
US11581206B2Feb 14, 2023
Capacitive sensor for chamber condition monitoring
APPLIED MATERIALS INC0 citations49
US10730798B2Aug 4, 2020
Slurry plasma spray of plasma resistant ceramic coating
APPLIED MATERIALS INC0 citations41