Inventor

SUURONEN DAVID

US5 patents

⚠️ This page may combine multiple inventors who share the name “SUURONEN DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUURONEN DAVID

2 patents

US9692325B2Jun 27, 2017

High conductivity electrostatic chuck

SUURONEN DAVID10 citations79

US8268081B2Sep 18, 2012

Platen cleaning method

SUURONEN DAVID0 citations38

COOKE RICHARD A

1 patent

US9025305B2May 5, 2015

High surface resistivity electrostatic chuck

COOKE RICHARD A5 citations69

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7715170B2May 11, 2010

Electrostatic chuck with separated electrodes

VARIAN SEMICONDUCTOR EQUIPMENT0 citations50

BLAKE JULIAN

1 patent

US9082804B2Jul 14, 2015

Triboelectric charge controlled electrostatic clamp

BLAKE JULIAN0 citations44