Inventor
STONE LYUDMILA
US15 patents
⚠️ This page may combine multiple inventors who share the name “STONE LYUDMILA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
5 patentsUS9644269B2May 9, 2017
Diffusion resistant electrostatic clamp
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US11222768B2Jan 11, 2022
Foam in ion implantation system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations56
US10385454B2Aug 20, 2019
Diffusion resistant electrostatic clamp
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US9633875B2Apr 25, 2017
Apparatus for improving temperature uniformity of a workpiece
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10643823B2May 5, 2020
Foam in ion implantation system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations46