Inventor
KIL BYUNG HO
KR2 patents
Patents
2 patentsUS10246772B2Apr 2, 2019
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
APPLIED MATERIALS INC5 citations70
US11365476B2Jun 21, 2022
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
APPLIED MATERIALS INC1 citations59