Inventor
SUN JIANING
CA9 patents
⚠️ This page may combine multiple inventors who share the name “SUN JIANING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS7176144B1Feb 13, 2007
Plasma detemplating and silanol capping of porous dielectric films
NOVELLUS SYSTEMS INC128 citations97
US7166531B1Jan 23, 2007
VLSI fabrication processes for introducing pores into dielectric materials
NOVELLUS SYSTEMS INC160 citations97
US7629224B1Dec 8, 2009
VLSI fabrication processes for introducing pores into dielectric materials
NOVELLUS SYSTEMS INC19 citations89
US7972976B1Jul 5, 2011
VLSI fabrication processes for introducing pores into dielectric materials
NOVELLUS SYSTEMS INC7 citations82