Inventor
OH DONG SUB
KR10 patents
Patents
10 patentsUS11148150B2Oct 19, 2021
Liquid dispensing nozzle and substrate treating apparatus
SEMES CO LTD17 citations77
US12308219B2May 20, 2025
Substrate treating method and substrate treating apparatus
SEMES CO LTD1 citations60
US12237151B2Feb 25, 2025
Apparatus and method for processing substrate using plasma
SEMES CO LTD0 citations59
US12146710B2Nov 19, 2024
Substrate treating apparatus and substrate treating system comprising the same
SEMES CO LTD0 citations57
US12142492B2Nov 12, 2024
Method for treating substrate and apparatus for treating substrate
SEMES CO LTD1 citations57
US12327735B2Jun 10, 2025
Apparatus and method for processing substrate
SEMES CO LTD0 citations49
US12542262B2Feb 3, 2026
Apparatus for treating substrate and method for treating substrate
SEMES CO LTD0 citations47
US12451358B2Oct 21, 2025
Method for fabricating semiconductor device and apparatus for processing substrate using plasma
SEMES CO LTD0 citations47
US12463015B2Nov 4, 2025
Substrate processing apparatus and method using the plasma
SEMES CO LTD0 citations46
US12448680B2Oct 21, 2025
Method of forming pattern structure including silicon nitride
SEMES CO LTD0 citations43