Inventor

KHEEL HYE JOON

KR3 patents

Patents

3 patents

US12347694B2Jul 1, 2025

Method and apparatus for treating substrate

SEMES CO LTD1 citations59

US12315699B2May 27, 2025

Substrate treating apparatus and substrate treating method

SEMES CO LTD0 citations48

US12448680B2Oct 21, 2025

Method of forming pattern structure including silicon nitride

SEMES CO LTD0 citations43