Inventor
D HEURLE FRANCOIS M
US5 patents
Patents
5 patentsUS5624869AApr 29, 1997
Method of forming a film for a multilayer Semiconductor device for improving thermal stability of cobalt silicide using platinum or nitrogen
IBM70 citations96
US5608266AMar 4, 1997
Thin film for a multilayer semiconductor device for improving thermal stability and a method thereof
IBM58 citations94
US5510295AApr 23, 1996
Method for lowering the phase transformation temperature of a metal silicide
IBM47 citations91
US5143867ASep 1, 1992
Method for depositing interconnection metallurgy using low temperature alloy processes
IBM31 citations91
US4012756AMar 15, 1977
Method of inhibiting hillock formation in films and film thereby and multilayer structure therewith
IBM22 citations81