Inventor
CHEN CHI-CHUN
TW57 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHI-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
27 patentsUS6706581B1Mar 16, 2004
Dual gate dielectric scheme: SiON for high performance devices and high k for low power devices
TAIWAN SEMICONDUCTOR MFG78 citations97
US6890811B2May 10, 2005
Dual gate dielectric scheme: SiON for high performance devices and high k for low power devices
TAIWAN SEMICONDUCTOR MFG63 citations95
US6727134B1Apr 27, 2004
Method of forming a nitride gate dielectric layer for advanced CMOS devices
TAIWAN SEMICONDUCTOR MFG26 citations93
US7871915B2Jan 18, 2011
Method for forming metal gates in a gate last process
TAIWAN SEMICONDUCTOR MFG38 citations92
US7071066B2Jul 4, 2006
Method and structure for forming high-k gates
TAIWAN SEMICONDUCTOR MFG46 citations92
US7030024B2Apr 18, 2006
Dual-gate structure and method of fabricating integrated circuits having dual-gate structures
TAIWAN SEMICONDUCTOR MFG31 citations92
US6737362B1May 18, 2004
Method for manufacturing a thin gate dielectric layer for integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG20 citations92
US7732344B1Jun 8, 2010
High selectivity etching process for metal gate N/P patterning
TAIWAN SEMICONDUCTOR MFG26 citations90
US6800566B2Oct 5, 2004
Adjustment of N and K values in a DARC film
TAIWAN SEMICONDUCTOR MFG19 citations84
US6780788B2Aug 24, 2004
Methods for improving within-wafer uniformity of gate oxide
TAIWAN SEMICONDUCTOR MFG12 citations74
US6864109B2Mar 8, 2005
Method and system for determining a component concentration of an integrated circuit feature
TAIWAN SEMICONDUCTOR MFG10 citations72
US6967130B2Nov 22, 2005
Method of forming dual gate insulator layers for CMOS applications
TAIWAN SEMICONDUCTOR MFG7 citations68
US8039375B2Oct 18, 2011
Shallow junction formation and high dopant activation rate of MOS devices
TAIWAN SEMICONDUCTOR MFG2 citations63
US7713854B2May 11, 2010
Gate dielectric layers and methods of fabricating gate dielectric layers
TAIWAN SEMICONDUCTOR MFG3 citations63
US7638396B2Dec 29, 2009
Methods for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG3 citations63
US7629275B2Dec 8, 2009
Multiple-time flash anneal process
TAIWAN SEMICONDUCTOR MFG4 citations63
US6767274B2Jul 27, 2004
Method to reduce defect/slurry residue for copper CMP
TAIWAN SEMICONDUCTOR MFG3 citations63
US6642117B1Nov 4, 2003
Method for forming composite dielectric layer
TAIWAN SEMICONDUCTOR MFG5 citations63
US6602799B2Aug 5, 2003
Method of forming a uniform ultra-thin gate oxide layer
TAIWAN SEMICONDUCTOR MFG5 citations63
US8357617B2Jan 22, 2013
Method of patterning a metal gate of semiconductor device
TAIWAN SEMICONDUCTOR MFG1 citations62
US7915105B2Mar 29, 2011
Method for patterning a metal gate
TAIWAN SEMICONDUCTOR MFG5 citations62
US7271450B2Sep 18, 2007
Dual-gate structure and method of fabricating integrated circuits having dual-gate structures
TAIWAN SEMICONDUCTOR MFG3 citations62
US7544561B2Jun 9, 2009
Electron mobility enhancement for MOS devices with nitrided polysilicon re-oxidation
TAIWAN SEMICONDUCTOR MFG4 citations60
US9362124B2Jun 7, 2016
Method of patterning a metal gate of semiconductor device
TAIWAN SEMICONDUCTOR MFG0 citations52
US8993452B2Mar 31, 2015
Method of patterning a metal gate of semiconductor device
TAIWAN SEMICONDUCTOR MFG0 citations52
US7727900B2Jun 1, 2010
Surface preparation for gate oxide formation that avoids chemical oxide formation
TAIWAN SEMICONDUCTOR MFG0 citations52
US7166525B2Jan 23, 2007
High temperature hydrogen annealing of a gate insulator layer to increase etching selectivity between conductive gate structure and gate insulator layer
TAIWAN SEMICONDUCTOR MFG1 citations52
GOGORO INC
3 patentsNAT SCIENCE COUNCIL
2 patentsIND TECH RES INST
2 patentsCHICONY POWER TECH CO LTD
2 patentsYU SAN
2 patentsGODET LUDOVIC
1 patentKWAK JOON SEOP
1 patentLEE DA-YUAN
1 patentNAT UNIV CHIN YI TECHNOLOGY
1 patentJIANG TAO
1 patentYEH MATT
1 patentASUSTEK COMP INC
1 patentEVANS MORGAN D
1 patentHOU TOU-HUNG
1 patentCHEN CHI-CHUN
1 patentTEO JOCELYN WEI-YEE
1 patentNIEH CHUN-FENG
1 patentShowing the top 50 of 57 patents by PatentIndex Score.