Inventor
PAIK YOUNG J
US15 patents
⚠️ This page may combine multiple inventors who share the name “PAIK YOUNG J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7349753B2Mar 25, 2008
Adjusting manufacturing process control parameter using updated process threshold derived from uncontrollable error
APPLIED MATERIALS INC68 citations97
US7221990B2May 22, 2007
Process control by distinguishing a white noise component of a process variance
APPLIED MATERIALS INC15 citations83
US9381613B2Jul 5, 2016
Reinforcement ring for carrier head
APPLIED MATERIALS INC11 citations82
US9227297B2Jan 5, 2016
Retaining ring with attachable segments
APPLIED MATERIALS INC9 citations79
US11738421B2Aug 29, 2023
Method of making carrier head membrane with regions of different roughness
APPLIED MATERIALS INC1 citations72
US11007619B2May 18, 2021
Carrier head membrane with regions of different roughness
APPLIED MATERIALS INC3 citations72
US12172264B2Dec 24, 2024
Carrier head membrane with regions of different roughness
APPLIED MATERIALS INC0 citations62
US7048607B1May 23, 2006
System and method for chemical mechanical planarization
APPLIED MATERIALS INC4 citations59
US9168631B2Oct 27, 2015
Two-part retaining ring with interlock features
APPLIED MATERIALS INC2 citations56
PAIK YOUNG J
4 patentsUS4251973AFeb 24, 1981
I-Beam construction and process therefor
PAIK YOUNG J54 citations94
US10160093B2Dec 25, 2018
Carrier head membrane roughness to control polishing rate
PAIK YOUNG J8 citations83
US8475231B2Jul 2, 2013
Carrier head membrane
PAIK YOUNG J13 citations83
US8662957B2Mar 4, 2014
Leak proof pad for CMP endpoint detection
PAIK YOUNG J7 citations82