Inventor
BHATNAGAR ASHISH
US28 patents
⚠️ This page may combine multiple inventors who share the name “BHATNAGAR ASHISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS6367412B1Apr 9, 2002
Porous ceramic liner for a plasma source
APPLIED MATERIALS INC135 citations97
US6391146B1May 21, 2002
Erosion resistant gas energizer
APPLIED MATERIALS INC73 citations96
US7732056B2Jun 8, 2010
Corrosion-resistant aluminum component having multi-layer coating
APPLIED MATERIALS INC25 citations92
US6673323B1Jan 6, 2004
Treatment of hazardous gases in effluent
APPLIED MATERIALS INC47 citations92
US6824748B2Nov 30, 2004
Heated catalytic treatment of an effluent gas from a substrate fabrication process
APPLIED MATERIALS INC18 citations83
US9627231B2Apr 18, 2017
Methods for bonding substrates
APPLIED MATERIALS INC7 citations82
US7045020B2May 16, 2006
Cleaning a component of a process chamber
APPLIED MATERIALS INC15 citations80
US9227297B2Jan 5, 2016
Retaining ring with attachable segments
APPLIED MATERIALS INC9 citations79
US11738421B2Aug 29, 2023
Method of making carrier head membrane with regions of different roughness
APPLIED MATERIALS INC1 citations72
US11007619B2May 18, 2021
Carrier head membrane with regions of different roughness
APPLIED MATERIALS INC3 citations72
US9481608B2Nov 1, 2016
Surface annealing of components for substrate processing chambers
APPLIED MATERIALS INC4 citations72
US10177014B2Jan 8, 2019
Thermal radiation barrier for substrate processing chamber components
APPLIED MATERIALS INC2 citations70
US12172264B2Dec 24, 2024
Carrier head membrane with regions of different roughness
APPLIED MATERIALS INC0 citations62
US9168631B2Oct 27, 2015
Two-part retaining ring with interlock features
APPLIED MATERIALS INC2 citations56
US10168229B2Jan 1, 2019
EMI/RF shielding of thermocouples
APPLIED MATERIALS INC1 citations55
US8043433B2Oct 25, 2011
High efficiency electro-static chucks for semiconductor wafer processing
APPLIED MATERIALS INC1 citations52
US10131126B2Nov 20, 2018
Methods for bonding substrates
APPLIED MATERIALS INC1 citations50
US9960019B2May 1, 2018
Life enhancement of ring assembly in semiconductor manufacturing chambers
APPLIED MATERIALS INC0 citations46
PAIK YOUNG J
3 patentsNARENDRNATH KADTHALA R
2 patentsUS8225927B2Jul 24, 2012
Method to substantially enhance shelf life of hygroscopic components and to improve nano-manufacturing process tool availablity
NARENDRNATH KADTHALA R9 citations82
US8464594B2Jun 18, 2013
Measuring flow properties of multiple gas nozzles of a gas distributor
NARENDRNATH KADTHALA R8 citations81