P

Inventor

BHATNAGAR ASHISH

US28 patents
⚠️ This page may combine multiple inventors who share the name “BHATNAGAR ASHISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

18 patents
US6367412B1Apr 9, 2002

Porous ceramic liner for a plasma source

APPLIED MATERIALS INC135 citations97
US6391146B1May 21, 2002

Erosion resistant gas energizer

APPLIED MATERIALS INC73 citations96
US7732056B2Jun 8, 2010

Corrosion-resistant aluminum component having multi-layer coating

APPLIED MATERIALS INC25 citations92
US6673323B1Jan 6, 2004

Treatment of hazardous gases in effluent

APPLIED MATERIALS INC47 citations92
US6824748B2Nov 30, 2004

Heated catalytic treatment of an effluent gas from a substrate fabrication process

APPLIED MATERIALS INC18 citations83
US9627231B2Apr 18, 2017

Methods for bonding substrates

APPLIED MATERIALS INC7 citations82
US7045020B2May 16, 2006

Cleaning a component of a process chamber

APPLIED MATERIALS INC15 citations80
US9227297B2Jan 5, 2016

Retaining ring with attachable segments

APPLIED MATERIALS INC9 citations79
US11738421B2Aug 29, 2023

Method of making carrier head membrane with regions of different roughness

APPLIED MATERIALS INC1 citations72
US11007619B2May 18, 2021

Carrier head membrane with regions of different roughness

APPLIED MATERIALS INC3 citations72
US9481608B2Nov 1, 2016

Surface annealing of components for substrate processing chambers

APPLIED MATERIALS INC4 citations72
US10177014B2Jan 8, 2019

Thermal radiation barrier for substrate processing chamber components

APPLIED MATERIALS INC2 citations70
US12172264B2Dec 24, 2024

Carrier head membrane with regions of different roughness

APPLIED MATERIALS INC0 citations62
US9168631B2Oct 27, 2015

Two-part retaining ring with interlock features

APPLIED MATERIALS INC2 citations56
US10168229B2Jan 1, 2019

EMI/RF shielding of thermocouples

APPLIED MATERIALS INC1 citations55
US8043433B2Oct 25, 2011

High efficiency electro-static chucks for semiconductor wafer processing

APPLIED MATERIALS INC1 citations52
US10131126B2Nov 20, 2018

Methods for bonding substrates

APPLIED MATERIALS INC1 citations50
US9960019B2May 1, 2018

Life enhancement of ring assembly in semiconductor manufacturing chambers

APPLIED MATERIALS INC0 citations46

PAIK YOUNG J

3 patents

NARENDRNATH KADTHALA R

2 patents

BHATNAGAR ASHISH

1 patent

DAS KESHAV C

1 patent

ARUN SANDHYA

1 patent

RAJ GOVINDA

1 patent

LOCKHEED CORP

1 patent