Inventor

JANG SEONG-DAI

KR2 patents

Patents

2 patents

US6413853B2Jul 2, 2002

Method of forming a tungsten plug in a semiconductor device

SAMSUNG ELECTRONICS CO LTD7 citations68

US9920997B2Mar 20, 2018

Cooling apparatus and system including the same

SAMSUNG ELECTRONICS CO LTD0 citations28