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Inventor
FRANKE ANDREA
US
3 patents
⚠️ This page may combine multiple inventors who share the name “FRANKE ANDREA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
2 patents
US6210988B1
Apr 3, 2001
Polycrystalline silicon germanium films for forming micro-electromechanical systems
UNIV CALIFORNIA
347 citations
98
US6448622B1
Sep 10, 2002
Polycrystalline silicon-germanium films for micro-electromechanical systems application
UNIV CALIFORNIA
167 citations
97
FREESCALE SEMICONDUCTOR INC
1 patent
US6891229B2
May 10, 2005
Inverted isolation formed with spacers
FREESCALE SEMICONDUCTOR INC
6 citations
59