P

Inventor

WU CHENG-HSUAN

TW43 patents
⚠️ This page may combine multiple inventors who share the name “WU CHENG-HSUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

17 patents
US12055864B2Aug 6, 2024

Droplet generator and method of servicing a photolithographic tool

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11392041B2Jul 19, 2022

Particle removal device and method

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11275317B1Mar 15, 2022

Droplet generator and method of servicing a photolithographic tool

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11553581B2Jan 10, 2023

Radiation source apparatus and method for using the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11533799B1Dec 20, 2022

System and method for supplying target material in an EUV light source

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11809083B2Nov 7, 2023

EUV photolithography system fuel source and methods of operating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12405541B2Sep 2, 2025

Methods of servicing photolithographic apparatus

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12158701B2Dec 3, 2024

Particle removal device and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096543B2Sep 17, 2024

Method for using radiation source apparatus

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11576250B1Feb 7, 2023

Semiconductor processing tool and methods of operation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11537053B2Dec 27, 2022

Semiconductor processing tool and methods of operation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235586B2Feb 25, 2025

EUV photolithography system fuel source and methods of operating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12167526B2Dec 10, 2024

Method and system for generating droplets for EUV photolithography processes

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12066761B2Aug 20, 2024

Inspection tool for an extreme ultraviolet radiation source to observe tin residual

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11528797B2Dec 13, 2022

Method and system for generating droplets for EUV photolithography processes

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11442365B1Sep 13, 2022

EUV photolithography system and methods of operating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12063734B2Aug 13, 2024

Droplet generator assembly and method of replacing components

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50

WU CHENG-HSUAN

12 patents

ADVANCED SEMICONDUCTOR ENG

5 patents

TU YUNG-SZU

2 patents

RALINK TECHNOLOGY CORP

1 patent

PARE JR THOMAS E

1 patent

WEN CHUN HSIEN

1 patent

TU YUNG SZU

1 patent

WISTRON CORP

1 patent

LIAO YEN-CHIN

1 patent

EVEREST TEXTILE CO LTD

1 patent