Inventor
ALDRICH DAVID B
US8 patents
Patents
8 patentsUS7109838B2Sep 19, 2006
System for integrating a toroidal inductor in a semiconductor device
TEXAS INSTRUMENTS INC34 citations92
US7001848B1Feb 21, 2006
Hydrogen plasma photoresist strip and polymeric residue cleanup process for oxygen-sensitive materials
TEXAS INSTRUMENTS INC25 citations92
US6599829B2Jul 29, 2003
Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization
TEXAS INSTRUMENTS INC39 citations92
US6600208B2Jul 29, 2003
Versatile system for integrated circuit containing shielded inductor
TEXAS INSTRUMENTS INC24 citations92
US6727185B1Apr 27, 2004
Dry process for post oxide etch residue removal
TEXAS INSTRUMENTS INC18 citations83
US6958294B2Oct 25, 2005
Method for photoresist strip, sidewall polymer removal and passivation for aluminum metallization
TEXAS INSTRUMENTS INC7 citations73
US6246120B1Jun 12, 2001
Sidewalls for guiding the via etch
TEXAS INSTRUMENTS INC8 citations71
US6074943AJun 13, 2000
Sidewalls for guiding the via etch
TEXAS INSTRUMENTS INC15 citations71