Inventor
KIM TROY
US3 patents
Patents
3 patentsUS6946033B2Sep 20, 2005
Heated gas distribution plate for a processing chamber
APPLIED MATERIALS INC227 citations98
US7132353B1Nov 7, 2006
Boron diffusion barrier by nitrogen incorporation in spacer dielectrics
APPLIED MATERIALS INC67 citations94
US6923189B2Aug 2, 2005
Cleaning of CVD chambers using remote source with cxfyoz based chemistry
APPLIED MATERIALS INC8 citations73