Inventor
ZHAO MAOSHENG
US17 patents
⚠️ This page may combine multiple inventors who share the name “ZHAO MAOSHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7500445B2Mar 10, 2009
Method and apparatus for cleaning a CVD chamber
APPLIED MATERIALS INC187 citations98
US6946033B2Sep 20, 2005
Heated gas distribution plate for a processing chamber
APPLIED MATERIALS INC227 citations98
US6797643B2Sep 28, 2004
Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power
APPLIED MATERIALS INC84 citations98
US6914014B2Jul 5, 2005
Method for curing low dielectric constant film using direct current bias
APPLIED MATERIALS INC32 citations92
US6923189B2Aug 2, 2005
Cleaning of CVD chambers using remote source with cxfyoz based chemistry
APPLIED MATERIALS INC8 citations73
US7464717B2Dec 16, 2008
Method for cleaning a CVD chamber
APPLIED MATERIALS INC8 citations72
US6932092B2Aug 23, 2005
Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy
APPLIED MATERIALS INC4 citations63
US7654224B2Feb 2, 2010
Method and apparatus for cleaning a CVD chamber
APPLIED MATERIALS INC1 citations61
US7465357B2Dec 16, 2008
Computer-readable medium that contains software for executing a method for cleaning a CVD chamber
APPLIED MATERIALS INC0 citations51
ENDO RICK
6 patentsUS8770143B2Jul 8, 2014
Multi-region processing system
ENDO RICK19 citations92
US8932995B2Jan 13, 2015
Combinatorial process system
ENDO RICK1 citations62
US8771483B2Jul 8, 2014
Combinatorial process system
ENDO RICK2 citations62
US8449678B2May 28, 2013
Combinatorial process system
ENDO RICK2 citations62
US8387563B2Mar 5, 2013
Combinatorial process system
ENDO RICK1 citations62
US8758581B2Jun 24, 2014
Combinatorial process system
ENDO RICK0 citations51