Inventor
MORIKAWA MASATERU
JP17 patents
Patents
17 patentsUS6416583B1Jul 9, 2002
Film forming apparatus and film forming method
TOKYO ELECTRON LTD128 citations99
US6627263B2Sep 30, 2003
Film forming apparatus and film forming method
TOKYO ELECTRON LTD95 citations98
US6676757B2Jan 13, 2004
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD60 citations96
US6383948B1May 7, 2002
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD57 citations96
US6371667B1Apr 16, 2002
Film forming method and film forming apparatus
TOKYO ELECTRON LTD76 citations96
US6872256B2Mar 29, 2005
Film forming unit
TOKYO ELECTRON LTD25 citations92
US6695922B2Feb 24, 2004
Film forming unit
TOKYO ELECTRON LTD32 citations92
US6616760B2Sep 9, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6605153B2Aug 12, 2003
Coating film forming apparatus
TOKYO ELECTRON LTD26 citations92
US6599366B1Jul 29, 2003
Substrate processing unit and processing method
TOKYO ELECTRON LTD32 citations92
US6537373B1Mar 25, 2003
Method of forming film and apparatus thereof
TOKYO ELECTRON LTD36 citations92
US6514344B2Feb 4, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6716478B2Apr 6, 2004
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD17 citations84
US6860945B2Mar 1, 2005
Substrate coating unit and substrate coating method
TOKYO ELECTRON LTD12 citations83
US6933015B2Aug 23, 2005
Method of forming film
TOKYO ELECTRON LTD5 citations74
US7087118B2Aug 8, 2006
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD6 citations73
US6936107B2Aug 30, 2005
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD11 citations73