Inventor
OOKUMA HIROFUMI
JP12 patents
Patents
12 patentsUS6676757B2Jan 13, 2004
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD60 citations96
US6383948B1May 7, 2002
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD57 citations96
US6872256B2Mar 29, 2005
Film forming unit
TOKYO ELECTRON LTD25 citations92
US6616760B2Sep 9, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6616762B2Sep 9, 2003
Treatment solution supply apparatus and treatment solution supply method
TOKYO ELECTRON LTD29 citations92
US6605153B2Aug 12, 2003
Coating film forming apparatus
TOKYO ELECTRON LTD26 citations92
US6514344B2Feb 4, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6790283B2Sep 14, 2004
Coating apparatus
TOKYO ELECTRON LTD18 citations91
US6716478B2Apr 6, 2004
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD17 citations84
US6830774B2Dec 14, 2004
Coating method
TOKYO ELECTRON LTD13 citations82
US7087118B2Aug 8, 2006
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD6 citations73
US6936107B2Aug 30, 2005
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD11 citations73