Inventor
ELLIOTT ROBERT FAYE
US3 patents
Patents
3 patentsUS7368312B1May 6, 2008
MEMS sensor suite on a chip
MORGAN RES CORP36 citations87
US7749793B2Jul 6, 2010
Method for fabricating lateral-moving micromachined thermal bimorph
MORGAN RES CORP3 citations57
US7629664B1Dec 8, 2009
Lateral-moving micromachined thermal bimorph and method for fabricating same
MORGAN RES CORP0 citations46