Inventor
STEWART DIANE K
US6 patents
⚠️ This page may combine multiple inventors who share the name “STEWART DIANE K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
5 patentsUS7504182B2Mar 17, 2009
Photolithography mask repair
FEI CO35 citations89
US6979822B1Dec 27, 2005
Charged particle beam system
FEI CO48 citations87
US7662524B2Feb 16, 2010
Photolithography mask repair
FEI CO14 citations81
US7727681B2Jun 1, 2010
Electron beam processing for mask repair
FEI CO9 citations80
US7544938B1Jun 9, 2009
Methods and apparatus for statistical characterization of nano-particles
FEI CO13 citations79