Inventor
BERGER STEVEN
US10 patents
⚠️ This page may combine multiple inventors who share the name “BERGER STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
6 patentsUS7504182B2Mar 17, 2009
Photolithography mask repair
FEI CO35 citations89
US7906762B2Mar 15, 2011
Compact scanning electron microscope
FEI CO25 citations88
US7662524B2Feb 16, 2010
Photolithography mask repair
FEI CO14 citations81
US7727681B2Jun 1, 2010
Electron beam processing for mask repair
FEI CO9 citations80
US9865427B2Jan 9, 2018
User interface for an electron microscope
FEI CO2 citations70
US7917349B2Mar 29, 2011
Combined hardware and software instrument simulator for use as a teaching aid
FEI CO2 citations61