Inventor
YASUMOTO TAMIHIDE
JP3 patents
⚠️ This page may combine multiple inventors who share the name “YASUMOTO TAMIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU SEMICONDUCTOR LTD
2 patentsUS7755753B2Jul 13, 2010
Defect inspection apparatus, sensitivity calibration method for the same, substrate for defect detection sensitivity calibration, and manufacturing method thereof
FUJITSU SEMICONDUCTOR LTD3 citations58
US7948618B2May 24, 2011
Defect inspection method and apparatus with a threshold value determination
FUJITSU SEMICONDUCTOR LTD2 citations57