Inventor
LIN TZUNG-HUA
TW6 patents
Patents
6 patentsUS10096519B2Oct 9, 2018
Method of making a FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US9437497B2Sep 6, 2016
Method of making a FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations80
US11081394B2Aug 3, 2021
Method of making a FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US12315737B2May 27, 2025
Feature patterning using pitch relaxation and directional end-pushing with ion bombardment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11688610B2Jun 27, 2023
Feature patterning using pitch relaxation and directional end-pushing with ion bombardment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US9929153B2Mar 27, 2018
Method of making a FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations38