Inventor
TSENG CHIEN-HUNG
NL4 patents
Patents
4 patentsUS10107761B2Oct 23, 2018
Method and device for focusing in an inspection system
ASML NETHERLANDS BV5 citations71
US10551750B2Feb 4, 2020
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV2 citations68
US10310388B2Jun 4, 2019
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV1 citations57
US11372343B2Jun 28, 2022
Alignment method and associated metrology device
ASML NETHERLANDS BV0 citations56