Inventor
CHEN JAY JIANHUI
US5 patents
Patents
5 patentsUS9903823B2Feb 27, 2018
Metrology method and apparatus
ASML NETHERLANDS BV10 citations83
US10551750B2Feb 4, 2020
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV2 citations68
US11281113B2Mar 22, 2022
Method for determining stack configuration of substrate
ASML NETHERLANDS BV3 citations63
US10310388B2Jun 4, 2019
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV1 citations57
US10983440B2Apr 20, 2021
Selection of substrate measurement recipes
ASML NETHERLANDS BV0 citations49