Inventor
YE WEINAN
CN7 patents
Patents
7 patentsUS11307018B2Apr 19, 2022
Two-degree-of-freedom heterodyne grating interferometry measurement system
UNIV TSINGHUA2 citations71
US9903704B2Feb 27, 2018
Three-DOF heterodyne grating interferometer displacement measurement system
UNIV TSINGHUA2 citations71
US11703361B2Jul 18, 2023
Five-degree-of-freedom heterodyne grating interferometry system
UNIV TSINGHUA0 citations50
US9791789B2Oct 17, 2017
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations49
US11525673B2Dec 13, 2022
Five-degree-of-freedom heterodyne grating interferometry system
UNIV TSINGHUA0 citations47
US12332053B2Jun 17, 2025
Heterodyne grating interferometry system based on secondary diffraction
UNIV TSINGHUA0 citations45
US9904183B2Feb 27, 2018
Coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations39