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Inventor
WONG JUSTIN H
US
2 patents
Patents
2 patents
US12374571B2
Jul 29, 2025
Displacement measurements in semiconductor wafer processing
APPLIED MATERIALS INC
0 citations
55
US11724355B2
Aug 15, 2023
Substrate polish edge uniformity control with secondary fluid dispense
APPLIED MATERIALS INC
1 citations
51