Inventor

BATES GRAHAM M

US9 patents

⚠️ This page may combine multiple inventors who share the name “BATES GRAHAM M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BATES GRAHAM M

3 patents

US9057004B2Jun 16, 2015

Slurry for chemical-mechanical polishing of metals and use thereof

BATES GRAHAM M0 citations46

US8734665B2May 27, 2014

Slurry for chemical-mechanical polishing of copper and use thereof

BATES GRAHAM M1 citations46

US8210904B2Jul 3, 2012

Slurryless mechanical planarization for substrate reclamation

BATES GRAHAM M0 citations41

GLOBALFOUNDRIES INC

2 patents

US9708508B2Jul 18, 2017

Slurry for chemical-mechanical polishing of metals and use thereof

GLOBALFOUNDRIES INC0 citations49

US9221241B2Dec 29, 2015

Apparatus and method for removing a CMP pad from a platen

GLOBALFOUNDRIES INC0 citations44

BANDY JOHN J

1 patent

US8715460B2May 6, 2014

Apparatus and method for removing a CMP pad from a platen

BANDY JOHN J4 citations60

MCDEVITT THOMAS L

1 patent

US8088690B2Jan 3, 2012

CMP method

MCDEVITT THOMAS L3 citations55

AMOAH YOBA

1 patent

US8637403B2Jan 28, 2014

Locally tailoring chemical mechanical polishing (CMP) polish rate for dielectrics

AMOAH YOBA1 citations47

IBM

1 patent

US9348057B2May 24, 2016

Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette

IBM0 citations44