Inventor
KLEINKNECHT HANS P
13 patents
⚠️ This page may combine multiple inventors who share the name “KLEINKNECHT HANS P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RCA CORP
12 patentsUS4408884AOct 11, 1983
Optical measurements of fine line parameters in integrated circuit processes
RCA CORP217 citations98
US4330213AMay 18, 1982
Optical line width measuring apparatus and method
RCA CORP60 citations96
US4141780AFeb 27, 1979
Optically monitoring the thickness of a depositing layer
RCA CORP80 citations96
US4668080AMay 26, 1987
Method and apparatus for forming large area high resolution patterns
RCA CORP54 citations95
US4211488AJul 8, 1980
Optical testing of a semiconductor
RCA CORP76 citations95
US4211489AJul 8, 1980
Photomask alignment system
RCA CORP67 citations94
US4708436ANov 24, 1987
Optical imager with diffractive lenticular array
RCA CORP36 citations92
US4303341ADec 1, 1981
Optically testing the lateral dimensions of a pattern
RCA CORP51 citations87
US4456879AJun 26, 1984
Method and apparatus for determining the doping profile in epitaxial layers of semiconductors
RCA CORP22 citations81
US4422763ADec 27, 1983
Automatic photomask alignment system for projection printing
RCA CORP26 citations81
US4188123AFeb 12, 1980
Optically measuring the carrier concentration in a semiconductor
RCA CORP27 citations81
US4579454AApr 1, 1986
Optical profilometer for steep surface contours with significant surface tilt
RCA CORP4 citations62