Inventor

HAWRYLUK ANDREW M

US63 patents

⚠️ This page may combine multiple inventors who share the name “HAWRYLUK ANDREW M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAWRYLUK ANDREW M

ULTRATECH STEPPER INC

Method for laser thermal processing using thermally induced reflectivity switch

Apparatus having line source of radiant energy for exposing a substrate

Thermally induced phase switch for laser thermal processing

Thermally induced reflectivity switch for laser thermal processing

Method of forming thermally induced reflectivity switch for laser thermal processing

Laser thermal processing apparatus and method

Thermally induced reflectivity switch for laser thermal processing

Methods for determining wavelength and pulse length of radiant energy used for annealing

Method of and apparatus for defining disk tracks in magnetic recording media

Acousto-optical light tunnel apparatus and method

Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits

Apparatus for and method of reducing or eliminating interference effects in a light tunnel illuminator

Radiant energy monitoring apparatuses including a calibration operation and related methods

Radiation shield device and method

ULTRATECH INC

Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

Methods for annealing a substrate and article produced by such methods

Laser annealing systems and methods with ultra-short dwell times

Method and apparatus for forming device quality gallium nitride layers on silicon substrates

Laser annealing systems and methods with ultra-short dwell times

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation

Methods of laser processing photoresist in a gaseous environment

Betavoltaic power sources for mobile device applications

Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations

Laser annealing systems and methods with ultra-short dwell times

Betavoltaic power sources for transportation applications

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation

US ENERGY

Giant magnetoresistive sensor

Broadband diffractive lens or imaging element

X-ray beamsplitter

Virtually distortion-free imaging system for large field, high resolution lithography using electrons, ions or other particle beams

Virtually distortion-free imaging system for large field, high resolution lithography

HAWRYLUK ANDREW M

Soft x-ray reduction camera for submicron lithography

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

Sub-field enhanced global alignment

Apparatus and method for improving the intensity profile of a beam image used to process a substrate

WANG YUN

Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication

Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication

Non-melt thin-wafer laser thermal annealing methods

Fast thermal annealing of GaN LEDs

PHOTON DYNAMICS INC

Direct detect sensor for flat panel displays

Method for capacitive testing of flat panel displays

VEECO INSTR INC

Laser annealing systems and methods with ultra-short dwell times

Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing

US ARMY

Broadband diffractive lens or imaging element

ZAFIROPOULO ARTHUR W

Electrically conductive structure on a semiconductor substrate formed from printing

UNIV CALIFORNIA

Forming aspheric optics by controlled deposition

ZLATANOV BORISLAV

Programmable illuminator for a photolithography system

STITES DAVID G

LED-based photolithographic illuminator with high collection efficiency

HSIEH ROBERT L

Optical alignment methods for forming LEDs having a rough surface