Inventor

GREK BORIS

US20 patents

⚠️ This page may combine multiple inventors who share the name “GREK BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GREK BORIS

ULTRATECH INC

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

Laser thermal annealing of lightly doped silicon substrates

Methods and apparatus for temperature measurement and control on a remote substrate surface

Laser thermal annealing of lightly doped silicon substrates

Heat shield for thermal processing

Methods and apparatus for irradiating a substrate to avoid substrate edge damage

CO2 laser stabilization systems and methods

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

ULTRATECH STEPPER INC

Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt

Acousto-optical light tunnel apparatus and method

HAWRYLUK ANDREW M

Apparatus and methods for improving the intensity profile of a beam image used to process a substrate

Apparatus and method for improving the intensity profile of a beam image used to process a substrate

ANDEVICES INC

Duplex arrayed waveguide grating

Integrated optics based high-resolution spectrophotometer

ENABLENCE USA COMPONENTS INC

Broadcasting arrayed waveguide

Ultra-wide band AWG multiplexer

GREK BORIS

Apparatuses and methods for irradiating a substrate to avoid substrate edge damage

Evaporative thermal management of grazing incidence collectors for EUV lithography

UNIV PRINCETON

Method and apparatus for measuring micro structures, anisotropy and birefringence in polymers using laser scattered light

BIANUCCI GIOVANNI

Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography