Inventor
WALDO III WHITSON G
US7 patents
Patents
7 patentsUS5355306AOct 11, 1994
Alignment system and method of alignment by symmetrical and asymmetrical analysis
MOTOROLA INC40 citations90
US5469263ANov 21, 1995
Method for alignment in photolithographic processes
MOTOROLA INC8 citations73
US5548625AAug 20, 1996
Method for parallel multiple field processing in X-ray lithography
MOTOROLA INC12 citations71
US4977048ADec 11, 1990
Actinic alignment to CEM coated resist films
MOTOROLA INC8 citations71
US4891094AJan 2, 1990
Method of optimizing photoresist contrast
MOTOROLA INC7 citations71
US5552247ASep 3, 1996
Method for patterning an X-ray master mask
MOTOROLA INC2 citations60
US5485498AJan 16, 1996
X-ray interface and condenser
MOTOROLA INC5 citations56