Inventor
MAGNI ENRICO
US11 patents
⚠️ This page may combine multiple inventors who share the name “MAGNI ENRICO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS7442114B2Oct 28, 2008
Methods for silicon electrode assembly etch rate and etch uniformity recovery
LAM RES CORP14 citations82
US9234775B2Jan 12, 2016
Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber
LAM RES CORP6 citations72
US7341673B2Mar 11, 2008
Methods and apparatus for in situ substrate temperature monitoring by electromagnetic radiation emission
LAM RES CORP3 citations60
US7291286B2Nov 6, 2007
Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses
LAM RES CORP2 citations57
US9694453B2Jul 4, 2017
Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer
LAM RES CORP0 citations51
US9945736B2Apr 17, 2018
Methods and apparatus for in situ substrate temperature monitoring by electromagnetic radiation emission
LAM RES CORP0 citations50
US7226869B2Jun 5, 2007
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
LAM RES CORP1 citations46
MAGNI ENRICO
3 patentsUS8813764B2Aug 26, 2014
Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer
MAGNI ENRICO3 citations60
US8997684B2Apr 7, 2015
Prevention of particle adders when contacting a liquid meniscus over a substrate
MAGNI ENRICO2 citations56
US8580045B2Nov 12, 2013
Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer
MAGNI ENRICO0 citations49