Inventor
HUYNH TAC
US3 patents
Patents
3 patentsUS5822213AOct 13, 1998
Method and apparatus for determining the center and orientation of a wafer-like object
LAM RES CORP97 citations93
US6328637B1Dec 11, 2001
Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
LAM RES CORP17 citations90
US6086460AJul 11, 2000
Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
LAM RES CORP41 citations90