Inventor
MACCAGNAN RENZO
FR8 patents
Patents
8 patentsUS6363294B1Mar 26, 2002
Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision
IBM491 citations96
US5874345AFeb 23, 1999
Method for planarizing TEOS SiO2 filled shallow isolation trenches
IBM32 citations90
US6716764B1Apr 6, 2004
Method of forming first level of metallization in DRAM chips
IBM24 citations89
US6417072B2Jul 9, 2002
Method of forming STI oxide regions and alignment marks in a semiconductor structure with one masking step
IBM20 citations88
US6281068B1Aug 28, 2001
Method for buried plate formation in deep trench capacitors
IBM36 citations87
US5930585AJul 27, 1999
Collar etch method to improve polysilicon strap integrity in DRAM chips
IBM21 citations87
US6258727B1Jul 10, 2001
Method of forming metal lands at the M0 level with a non selective chemistry
IBM12 citations72
US6297089B1Oct 2, 2001
Method of forming buried straps in DRAMs
IBM14 citations71