Inventor

HSIA SHAO-WEN

US6 patents

⚠️ This page may combine multiple inventors who share the name “HSIA SHAO-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CONEXANT SYSTEMS INC

4 patents

US6383821B1May 7, 2002

Semiconductor device and process

CONEXANT SYSTEMS INC22 citations91

US6291361B1Sep 18, 2001

Method and apparatus for high-resolution in-situ plasma etching of inorganic and metal films

CONEXANT SYSTEMS INC17 citations91

US6251568B1Jun 26, 2001

Methods and apparatus for stripping photoresist and polymer layers from a semiconductor stack in a non-corrosive environment

CONEXANT SYSTEMS INC14 citations65

US6328848B1Dec 11, 2001

Apparatus for high-resolution in-situ plasma etching of inorganic and metal films

CONEXANT SYSTEMS INC2 citations61

UNIV ARIZONA

1 patent

US5314772AMay 24, 1994

High resolution, multi-layer resist for microlithography and method therefor

UNIV ARIZONA438 citations98

NEWPORT FAB LLC

1 patent

US6798065B2Sep 28, 2004

Method and apparatus for high-resolution in-situ plasma etching of inorganic and metals films

NEWPORT FAB LLC4 citations61