Inventor
KUBISTA DAVID J
US15 patents
⚠️ This page may combine multiple inventors who share the name “KUBISTA DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
14 patentsUS7422635B2Sep 9, 2008
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
MICRON TECHNOLOGY INC483 citations99
US6461436B1Oct 8, 2002
Apparatus and process of improving atomic layer deposition chamber performance
MICRON TECHNOLOGY INC579 citations98
US5409587AApr 25, 1995
Sputtering with collinator cleaning within the sputtering chamber
MICRON TECHNOLOGY INC63 citations96
US7647886B2Jan 19, 2010
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers
MICRON TECHNOLOGY INC45 citations92
US7056806B2Jun 6, 2006
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
MICRON TECHNOLOGY INC23 citations92
US6758911B2Jul 6, 2004
Apparatus and process of improving atomic layer deposition chamber performance
MICRON TECHNOLOGY INC32 citations92
US6716284B2Apr 6, 2004
Apparatus and process of improving atomic layer deposition chamber performance
MICRON TECHNOLOGY INC24 citations92
US7906393B2Mar 15, 2011
Methods for forming small-scale capacitor structures
MICRON TECHNOLOGY INC8 citations84
US7344755B2Mar 18, 2008
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
MICRON TECHNOLOGY INC10 citations84
US7258892B2Aug 21, 2007
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
MICRON TECHNOLOGY INC13 citations84
US7235138B2Jun 26, 2007
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
MICRON TECHNOLOGY INC14 citations84
US7771537B2Aug 10, 2010
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition
MICRON TECHNOLOGY INC5 citations74
US7279398B2Oct 9, 2007
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
MICRON TECHNOLOGY INC6 citations74
US8384192B2Feb 26, 2013
Methods for forming small-scale capacitor structures
MICRON TECHNOLOGY INC2 citations63