Inventor

FUKUZAKI YOSHIKI

JP2 patents

Patents

2 patents

US7315373B2Jan 1, 2008

Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning device

RORZE CORP8 citations60

US11688617B2Jun 27, 2023

Electrostatic capacitance sensor

RORZE CORP0 citations51