Inventor
FUKUE KUMIKO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “FUKUE KUMIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
3 patentsUS7929139B2Apr 19, 2011
Spectroscopic ellipsometer, film thickness measuring apparatus, and method of focusing in spectroscopic ellipsometer
DAINIPPON SCREEN MFG4 citations59
US7557919B2Jul 7, 2009
Apparatus for detecting position of substrate, ellipsometer, and film thickness measuring apparatus
DAINIPPON SCREEN MFG5 citations56
US7864318B2Jan 4, 2011
Spectroscopic ellipsometer and ellipsometry
DAINIPPON SCREEN MFG1 citations45