Inventor
KUMAGAI YASUNORI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KUMAGAI YASUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7701241B2Apr 20, 2010
Circuit for protecting DUT, method for protecting DUT, testing apparatus and testing method
TOKYO ELECTRON LTD3 citations60
US7633309B2Dec 15, 2009
Inspection method, inspection apparatus and computer-readable storage medium storing program for inspecting an electrical property of an object
TOKYO ELECTRON LTD5 citations53
US11276592B2Mar 15, 2022
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations48
US9786494B2Oct 10, 2017
Film formation method and film formation apparatus
TOKYO ELECTRON LTD0 citations36